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Surface modification of titanium through amino group implantation

Y Z Yang1, J M Tian, J T Tian

  • 1Beijing Fine Ceramics Laboratory, State Key Laboratory of New Ceramics and Fine Processing, Institute of Nuclear Energy Technology, School of Materials Science and Engineering, Tsinghua University, Beijing 100084, PRChina. yangyz@tsinghua.edu.cn

Summary

Amino group implantation modified titanium (Ti) surfaces, forming a titanium nitride (TiN) layer. Contamination resulted in a hydrocarbon overlayer, while the oxide layer thickened. This study details the surface modification process and characterization.

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