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Related Experiment Videos

Progress in aberration-corrected scanning transmission electron microscopy.

N Dellby1, O L Krivanek, P D Nellist

  • 1Nion R & D, Kirkland, WA 98033, USA.

Journal of Electron Microscopy
|July 27, 2001
PubMed
Summary
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A new spherical aberration corrector for scanning transmission electron microscopes (STEM) significantly improves resolution and probe current. This advancement enhances STEM capabilities for advanced materials analysis.

Area of Science:

  • Materials Science
  • Physics
  • Electron Microscopy

Background:

  • Spherical aberration limits resolution in scanning transmission electron microscopy (STEM).
  • Previous corrector designs faced stability challenges.

Purpose of the Study:

  • To develop and present a new corrector of spherical aberration (C(S)) for STEM.
  • To improve resolution, stability, and probe current in STEM.

Main Methods:

  • Implementation of strong octupoles in the corrector design.
  • Utilizing autotuning software for aberration coefficient measurement.
  • High-angle annular dark field imaging at 100 kV.

Main Results:

  • Achieved a point-to-point resolution of 1.23 Angstroms.

Related Experiment Videos

  • Increased available current in a 1.3 Angstrom probe by a factor of ten.
  • Improved overall stability compared to previous designs.

    • Conclusions:

    • The new corrector significantly advances aberration-corrected STEM capabilities.
    • Autotuning software greatly assists operation and aberration measurement.
    • Discusses current limits and future developments in aberration-corrected STEM.