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Updated: Oct 4, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Normally incident resonant grating reflection filters for efficient narrow-band spectral filtering of finite beams
D K Jacob1, S C Dunn, M G Moharam
1School of Optics/CREOL, University of Central Florida, Orlando 32816-2770, USA.
Abstract:
Resonant grating reflection filters operating at normal incidence are investigated. At normal incidence these structures are shown to have characteristics different from those of structures operated at oblique incidence. We show how higher-order diffraction within the structure laterally confines the incident energy about the point of incidence and results in a broadened angular selectivity. Multimode structures are shown to exhibit broader angular selectivities and narrower spectral linewidths than those of single-mode structures, achieving angular selectivities hundreds of times broader than what could be obtained at oblique incidence. When compared with that for oblique incidence, the increase in angular selectivity is shown to greatly improve the performance of these filters for spectrally filtering finite incident beams.
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