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Light collection efficiency and light transport in backscattered electron scintillator detectors in scanning electron
M N Filippov1, E I Rau, R A Sennov
1Institute of Microelectronics Technology, Russian Academy of Sciences, Chernogolovka.
Abstract:
Experimentally, scintillator detectors used in scanning electron microscopy (SEM) to record backscattered electrons (BSE) show a noticeable difference in detection efficiency in different parts of their active zones due to light losses transport in the optical part of the detector. A model is proposed that calculates the local efficiency of the active parts of scintillator detectors of arbitrary shapes. The results of these calculations for various designs are presented.
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