Automated analysis of submicron particles by computer-controlled scanning electron microscopy

Area of Science:

• Materials Science
• Analytical Chemistry
• Environmental Science

Background:

• Automated analysis of submicron particles using computer-controlled scanning electron microscopy (CCSEM) is a valuable technique.
• Understanding the limitations of CCSEM is crucial for accurate particle characterization.

Purpose of the Study:

• To evaluate the capabilities and limitations of automated CCSEM for submicron particle analysis.
• To identify key factors affecting particle detection and X-ray analysis accuracy.

Main Methods:

• Utilized computer-controlled scanning electron microscopy (CCSEM) for automated particle analysis.
• Investigated the influence of particle atomic number and microscope operating parameters on detection limits.
• Assessed the impact of specimen damage and system-related issues on analytical results.

Main Results:

• Submicron particle analysis is feasible with CCSEM, with detection limits influenced by particle atomic number and microscope parameters.
• The backscatter electron detector quality is a primary limitation for particle size detection.
• Specimen damage, particularly for environmental particles, significantly affects X-ray analysis accuracy, with a detection limit of approximately 1 wt% for most elements.
• Device limitations include specimen drift and unreliable autofocus.

Conclusions:

• Automated CCSEM is a viable method for submicron particle analysis, but careful consideration of its limitations is necessary.
• Particle properties, detector quality, and specimen integrity are critical factors for accurate automated analysis.
• Further improvements in detection systems and specimen handling are needed to enhance the reliability of CCSEM for environmental particle studies.