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Thermal Measurement Techniques in Analytical Microfluidic Devices
Published on: June 3, 2015
Thermo-optic design for microwave and millimeter-wave electromagnetic power microsensors
Salvatore Grasso1, Marco Bellucci, Giuseppe Cocorullo
1Consiglio Nazionale delle Ricerche, Istituto per la Microelettronica e i Microsistemi, Sezione di Napoli, Naples, Italy.
Applied Optics
|June 25, 2002
Summary
This study analyzes an all-silicon chip electromagnetic power sensor for microwaves and millimeter waves. Researchers demonstrate a minimum resolution of 1 mW/cm2 at frequencies above 10 GHz.
Area of Science:
- Microwave and millimeter wave engineering
- Optical sensing technologies
- Semiconductor device physics
Background:
- Electromagnetic power sensing is crucial for microwave and millimeter wave applications.
- Existing sensors may be perturbing or lack wideband capabilities.
- An optically interrogated all-silicon chip sensor was previously proposed.
Purpose of the Study:
- To theoretically analyze the performance of a novel optically interrogated all-silicon chip electromagnetic power sensor.
- To detail the sensor's sensitivity, resolution, detectivity, linearity, and response time.
- To explore optimized configurations based on parameter analysis.
Main Methods:
- Theoretical analysis of sensor performance metrics.
- Detailed discussion of sensitivity, resolution, detectivity, linearity, and response time.
- Comparison of theoretical predictions with experimental results.
Main Results:
- Demonstrated good agreement between theoretical analysis and experimental data.
- Achieved minimum resolutions of approximately 1 mW/cm2 at frequencies exceeding 10 GHz.
- Analyzed the influence of geometrical and electromagnetic parameters on sensor response.
Conclusions:
- The optically interrogated all-silicon chip sensor is a promising nonperturbing, wideband probe.
- The theoretical analysis validates the sensor's performance capabilities.
- Optimized configurations are achievable by tuning geometrical and electromagnetic parameters.
