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Automatic alignment of a displacement-measuring heterodyne interferometer.
Jennifer E Logan1, Peter G Halverson, Martin W Regehr
1Mission Research Corporation, Torrance, California 90503, USA.
Applied Optics
|August 1, 2002
Summary
This study introduces an automated alignment technique for interferometric gauges using circular beam modulation and digital signal processing. This method ensures optimal beam path alignment, minimizing drift for precise displacement measurements.
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