S Van Aert1, A J den Dekker, D Van Dyck
1Department of Applied Physics, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands. s.vanaert@tn.tudelft.nl
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This study redefines resolution in electron microscopy by introducing precision as a key metric. Precision in measuring component distances depends on factors like size, instrument resolution, and electron counts.
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