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A method to measure the effective gas path length in the environmental or variable pressure scanning electron
Raynald Gauvin1, Brendan Griffin, Clive Nockolds
1Department of Mining, Metals and Materials Engineering, McGill University, Montréal, Québec, Canada.
Scanning
|August 9, 2002
Summary
A new method determines effective gas path length in electron microscopy. This measurement, crucial for accurate analysis, is influenced by chamber pressure and x-ray detector type.
Area of Science:
- Materials Science
- Analytical Chemistry
- Physics
Background:
- Electron microscopy relies on precise measurements of electron-sample interactions.
- Scattering of incident electrons in residual gas within the microscope chamber can affect analytical signals.
- Accurate determination of the gas path length is essential for quantitative analysis.
Purpose of the Study:
- To develop a simple and effective method for determining the effective gas path length in electron microscopy.
- To investigate the influence of experimental parameters on the effective gas path length.
Main Methods:
- The method utilizes the measurement of a characteristic X-ray line emitted from a region near the incident electron beam.
- Experimental measurements were performed across different electron microscopes and conditions.
Main Results:
- The effective gas path length was found to increase with increasing chamber pressure.
- The effective gas path length was also observed to be dependent on the type of X-ray detector (bullet) used.
Conclusions:
- A straightforward method for measuring effective gas path length in electron microscopy has been established.
- Chamber pressure and X-ray detector type are significant factors influencing the effective gas path length, impacting analytical accuracy.