Jove
Visualize
Contact Us
JoVE
x logofacebook logolinkedin logoyoutube logo
ABOUT JoVE
OverviewLeadershipBlogJoVE Help Center
AUTHORS
Publishing ProcessEditorial BoardScope & PoliciesPeer ReviewFAQSubmit
LIBRARIANS
TestimonialsSubscriptionsAccessResourcesLibrary Advisory BoardFAQ
RESEARCH
JoVE JournalMethods CollectionsJoVE Encyclopedia of ExperimentsArchive
EDUCATION
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab ManualFaculty Resource CenterFaculty Site
Terms & Conditions of Use
Privacy Policy
Policies

Related Experiment Videos

Two-dimensional simulation and modeling in scanning electron microscope imaging and metrology research.

Michael T Postek1, András E Vladár, Jeremiah R Lowney

  • 1Precision Engineering Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA. postek@nist.gov

Scanning
|August 9, 2002
PubMed
Summary

This study introduces a new method for generating 2-D simulated scanning electron microscope (SEM) images from Monte Carlo modeling. This technique aids in matching theoretical and experimental SEM images for metrology applications.

Related Concept Videos

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by
Same author

Using a 4-Megapixel Hybrid Photon Counting Detector for Fast, Laboratory-Based Nanoscale X-Ray Tomography.

Microscopy and microanalysis : the official journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada·2026
Same author

Electron irradiation-based cleaning of the scanning electron microscope and its samples.

Micron (Oxford, England : 1993)·2025
Same author

Nanomanufacturing Concerns about Measurements Made in the SEM Part V: Dealing with Noise.

Proceedings of SPIE--the International Society for Optical Engineering·2025
Same author

Disinfection of Respirators with Ultraviolet Radiation.

Journal of research of the National Institute of Standards and Technology·2024
Same author

Models for an Ultraviolet-C Research and Development Consortium.

Journal of research of the National Institute of Standards and Technology·2024
Same author

Ultraviolet Radiation Technologies and Healthcare-Associated Infections: Standards and Metrology Needs.

Journal of research of the National Institute of Standards and Technology·2024

Area of Science:

  • Materials Science
  • Metrology
  • Computational Physics

Background:

  • Traditional Monte Carlo modeling in Scanning Electron Microscopy (SEM) provides 1D information via line scans.
  • Forward line scan modeling is useful for characterizing sample dimensions like linewidth.
  • Direct comparison between theoretical and experimental SEM images is challenging.

Purpose of the Study:

  • To introduce a method for generating 2-D simulated SEM images from forward-modeled line scan data.
  • To enable direct comparison between theoretical and experimental SEM images.
  • To facilitate the development of libraries of simulated images for metrology.

Main Methods:

  • Utilizing Monte Carlo modeling to simulate electron beam-specimen interactions.
  • Extending 1D forward line scan modeling results to construct 2D theoretical micrographs.

Related Experiment Videos

  • Comparing simulated 2D micrographs with experimental SEM images.

    • Main Results:

    • Successfully generated theoretical 2D SEM images (micrographs).
    • Demonstrated the ability to mimic and closely match experimental SEM images with simulations.
    • Established a foundation for creating libraries of simulated images.

    Conclusions:

    • The developed technique allows for the creation of 2D simulated SEM images.
    • This approach facilitates matching theory with experimental SEM data.
    • The method is valuable for critical dimension metrology, particularly for integrated circuit parts.