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Transmission electron microscopy (TEM) can be used to determine the 3D structure of biological samples with the help of techniques such as electron microscope tomography and single-particle reconstruction. While single-particle reconstruction can examine macromolecules and macromolecular complexes in vitro conditions only, tomography permits the study of cell components or small cells in vivo.
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Using a 4-Megapixel Hybrid Photon Counting Detector for Fast, Laboratory-Based Nanoscale X-Ray Tomography.

Jordan Fonseca1, Zachary H Levine2, Joseph W Fowler1

  • 1Quantum Sensors Division, National Institute of Standards and Technology, 325 Broadway, Boulder, CO 80305, USA.

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|May 12, 2026
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Summary
This summary is machine-generated.

Hybrid photon counting detectors (HPCDs) now enable faster, high-resolution laboratory nanoscale X-ray tomography (nano-xCT). This breakthrough achieves over 800x speedup for imaging integrated circuits, reconstructing 160-nm features at 75-80 nm resolution.

Keywords:
X-ray tomographycritical dimensionalityfailure analysishybrid photon counting detectorintegrated circuitsnano-xCTnanotomographyscanning electron microscopesemiconductor metrology

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Area of Science:

  • Materials Science
  • Physics
  • Engineering

Background:

  • Hybrid photon counting detectors (HPCDs) have advanced synchrotron X-ray measurements for 30 years.
  • HPCDs offer high quantum efficiency, low dark counts, and high count rates.
  • Their pixel size and active area provide excellent coverage and resolution for imaging.

Purpose of the Study:

  • To demonstrate the suitability of HPCDs for laboratory-based nanoscale X-ray tomography (nano-xCT).
  • To achieve significant speedup and improved photon collection in nano-xCT.
  • To validate experimental parameters and quantify image quality for high-resolution 3D reconstruction.

Main Methods:

  • Performed nano-xCT on a 130-nm node integrated circuit using an HPCD.
  • Collected over 40 times more photons and achieved data acquisition 20 times faster than previous work.
  • Quantified image quality using Modulation Transfer Function (MTF), Fourier Shell Correlation (FSC), and Contrast-to-Noise Ratio (CNR).

Main Results:

  • Achieved an overall speedup of over 800× for nano-xCT.
  • Successfully reconstructed 3D details of the integrated circuit.
  • Demonstrated 75-80 nm spatial resolution for 160-nm wiring features.

Conclusions:

  • HPCDs are effective for laboratory-based nano-xCT, enabling high-speed, high-resolution 3D imaging.
  • The study validates the technical considerations and performance metrics for using HPCDs in tabletop tomography.
  • This technology significantly enhances the capabilities of nanoscale imaging in a laboratory setting.