Numerical calculation of electron optical aberrations

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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

Published on: September 14, 2018

Erwin Kasper1

  • 1Institut für Angewandte Physik der Universität Tübingen, Auf der Morgenstelle 12, 72076 Tübingen, Germany.

Ultramicroscopy
|December 21, 2002
PubMed

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