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Development of Electron Probe Instrumentation during Those Early Days When Professor Castaing Visited Japan.

Ryuichi Shimizu1

  • 1Department of Applied Physics, Osaka University, Suita, Osaka 565-0871, Japan.

Summary

The development of electron probe microanalyzers (EPMA) in Japan began in the 1950s, with key research and a pivotal visit accelerating commercialization in the early 1960s. This led to the first EPMA instruments being installed in Japanese universities.

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