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Virtual optical experiments. Part I. Modeling the measurement process

Robert Thalhammer1, Gerhard Wachutka

  • 1Infineon Technologies, 81609 Munich, Germany. robert.thalhammer@infineon.com

Summary

This study presents a rigorous model for simulating internal laser probing techniques in semiconductors. The model optimizes electro-optical and thermo-optical measurements of charge-carrier and temperature distributions.

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