Related Experiment Videos
Virtual optical experiments. Part I. Modeling the measurement process
Robert Thalhammer1, Gerhard Wachutka
1Infineon Technologies, 81609 Munich, Germany. robert.thalhammer@infineon.com
Summary
This study presents a rigorous model for simulating internal laser probing techniques in semiconductors. The model optimizes electro-optical and thermo-optical measurements of charge-carrier and temperature distributions.
Area of Science:
- Semiconductor Physics
- Optical Measurement Techniques
- Computational Modeling
Background:
- Internal laser probing utilizes electro-optical and thermo-optical effects for semiconductor analysis.
- These techniques enable space- and time-resolved measurements of internal charge-carrier and temperature distributions.
Purpose of the Study:
- To develop a physically rigorous model for simulating the entire internal laser probing measurement process.
- To enable profound analysis and optimization of these advanced semiconductor characterization techniques.
Main Methods:
- Electrothermal device simulation of semiconductor operating conditions.
- Calculation of refractive-index modulations induced by operating conditions.
- Simulation of optical wave propagation through the device, optics, and detector response.
- Development of a numerically efficient algorithm for wave propagation in large domains using specialized computational variables.
Main Results:
- A comprehensive simulation model integrating device operation, optical effects, and detector response has been established.
- A novel, efficient algorithm significantly reduces computational cost for wave propagation simulations.
- The model allows for accurate simulation with coarser discretization, enhancing practical application.
Conclusions:
- The presented model provides a powerful tool for analyzing and optimizing internal laser probing techniques.
- The developed simulation approach facilitates deeper understanding and improved performance of semiconductor characterization methods.