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Virtual optical experiments. Part II. Design of experiments
Robert Thalhammer1, Gerhard Wachutka
1Infineon Technologies, 81609 Munich, Germany. robert.thalhammer@infineon.com
Summary
This study introduces virtual experiments for optical probing techniques, enabling analysis of parasitic effects and experimental accuracy. Backside laser probing offers high spatial resolution for detecting sample hot spots.
Area of Science:
- Optics and Photonics
- Materials Science
- Experimental Physics
Background:
- A physically rigorous model for optical probing was presented in Part I.
- Accurate simulation and design of optical experiments are crucial for reliable results.
Purpose of the Study:
- Introduce virtual experiments as a core strategy for optical measurement analysis.
- Support the design and optimization of optical probing experiments.
- Investigate parasitic effects, experimental accuracy, and optimal probing conditions.
Main Methods:
- Development and application of a virtual experiment framework.
- Theoretical analysis of optical probing techniques.
- Quantitative evaluation of free-carrier absorption measurements.
Main Results:
- Virtual experiments facilitate theoretical studies of parasitic effects and accuracy.
- Quantitative results identify optimum sample geometry and optical setup for free-carrier absorption.
- Backside laser probing demonstrates excellent spatial resolution.
Conclusions:
- Virtual experiments are a powerful tool for analyzing and designing optical probing techniques.
- Backside laser probing is effective for detecting hot spots with high spatial resolution.
- The study provides a framework for optimizing optical measurement strategies.