Electrostatic micromachine scanning mirror for optical coherence tomography
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Updated: Sep 26, 2026

Multimodal Volumetric Retinal Imaging by Oblique Scanning Laser Ophthalmoscopy (oSLO) and Optical Coherence Tomography (OCT)
Published on: August 4, 2018
J M Zara1, S Yazdanfar, K D Rao
1Department of Electrical and Computer Engineering, George Washington University, Washington, D.C. 20052, USA. jzara@gwu.edu
Abstract:
Compact electrostatic micromirror structures for use in the scanning arm of an optical coherence tomography (OCT) system are described. These devices consist of millimeter-scale mirrors resting upon micrometer-scale polyimide hinges that are tilted by a linear micromachine actuator, the integrated force array (IFA). The IFA is a network of deformable capacitor cells that electrostatically contract with an applied voltage. The support structures, hinges, and actuators are fabricated by photolithography from polyimide-upon-silicon wafers. These devices were inserted into the scanning arm of an experimental OCT imaging system to produce in vitro and in vivo images at frame rates of 4 to 8 Hz.
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