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Updated: Sep 25, 2026
Cooling Rate Dependent Ellipsometry Measurements to Determine the Dynamics of Thin Glassy Films
Published on: January 26, 2016
Simulation of depolarization effect by a rough surface for spectroscopic ellipsometry
Kyung Hoon Jun1, Joong Hwan Kwak, Koeng Su Lim
1Department of Electrical Engineering and Computer Science, Korea Advanced Institute of Science and Technology, 373-1 Guseong-dong, Yuseong-gu, Daejeon 305-701, Korea. samuel@mail.kaist.ac.kr
Abstract:
We employed the integral equation method (IEM) to simulate optical scattering by a randomly rough surface for spectroscopic ellipsometry. An explicit Mueller-matrix expression of the IEM for single scattering by moderately small surface roughness makes it possible to calculate the depolarization effect. The IEM allows a relatively rigorous assessment of the surface-scattering effect in a wide spectral range.
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