Lateral redistribution of trapped charges in nitride/oxide/Si (NOS) investigated by electrostatic force microscopy

Seung Jae Baik1, Koeng Su Lim, Wonsup Choi

  • 1Department of Electrical Engineering, Korea Advanced Institute of Science and Technology, Yuseong-gu, Daejeon, 305-701, Korea.

Nanoscale
|May 11, 2011
PubMed