Radiation enhanced silicon self-diffusion and the silicon vacancy at high temperatures

H Bracht1, J Fage Pedersen, N Zangenberg

  • 1Institut fuer Materialphysik, Universitaet Muenster, D-48149 Muenster, Germany. bract@uni-muenster.de

Physical Review Letters
|December 20, 2003
PubMed
Summary

Proton radiation enhanced self-diffusion (RESD) in silicon heterostructures reveals that vacancies diffuse slower at high temperatures. This unexpected behavior is linked to the vacancy