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Self-referenced method for optical path difference calibration in low-coherence interferometry.

M Laubscher1, L Froehly, B Karamata

  • 1Institute of Biomedical Imaging, Optics and Engineering, Swiss Federal Institute of Technology, CH-1015 Lausanne, Switzerland. markus.laubscher@epfl.ch

Optics Letters
|December 24, 2003
PubMed
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A new self-referenced calibration method for low-coherence interferometry uses spectral filtering to correct scan imperfections without a secondary light source. This technique enhances measurement accuracy for applications like optical thickness determination.

Area of Science:

  • Optical Physics
  • Metrology
  • Interferometry

Background:

  • Low-coherence interferometry (LCI) is crucial for precise measurements.
  • Calibration of optical path difference (OPD) modulation is essential for LCI accuracy.
  • Scan imperfections in LCI can degrade measurement quality.

Purpose of the Study:

  • To present a simple, self-referenced method for calibrating OPD modulation in LCI.
  • To enable correction of scan imperfections without external high-coherence sources.
  • To demonstrate the method's utility in precise thickness measurements.

Main Methods:

  • Spectrally filtering a portion of the detected LCI interference signal.
  • Generating a high-coherence signal from the filtered interference data.

Related Experiment Videos

  • Utilizing a spectrometer setup for flexible calibration wavelength and scan range selection.
  • Combining the calibration method with digital spectral shaping.
  • Main Results:

    • The spectrally filtered signal effectively encodes scan imperfections.
    • The method allows for self-referenced correction of these imperfections.
    • Successful measurement of pellicle beam splitter thickness using a white-light source.
    • Demonstrated flexibility in calibration parameters.

    Conclusions:

    • The presented method offers a simple and effective approach to LCI calibration.
    • It eliminates the need for a secondary high-coherence light source.
    • The technique enhances the accuracy and reliability of LCI measurements, particularly for thin film metrology.