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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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Published on: September 14, 2018

A new method for the determination of the wave aberration function for high-resolution TEM.; 2. Measurement of the

R R Meyer1, A I Kirkland, W O Saxton

  • 1Department of Materials Science and Metallurgy, University of Cambridge, Pembroke Street, Cambridge CB2 3QZ, UK.

Ultramicroscopy
|April 20, 2004
PubMed

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