Characterization of substrates for use in X-ray multilayer optics
G S Lodha1, K Yamashita, K Haga
1Department of Physics, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8602, Japan.
Journal of Synchrotron Radiation
|July 21, 2004
Summary
Platinum-carbon multilayers
Area of Science:
- Materials Science
- Optics
- Surface Science
Background:
- Multilayer coatings are crucial for optical applications.
- Understanding substrate influence on multilayer properties is essential.
- Platinum-carbon (Pt/C) multilayers offer unique optical characteristics.
Purpose of the Study:
- To investigate the optical performance of Pt/C multilayers.
- To analyze how substrate roughness affects multilayer structure.
- To evaluate the replication fidelity of surface topography.
Main Methods:
- Optical characterization using specular reflectivity and non-specular diffuse scattering.
- Surface topography measurement via scanning probe microscopy (SPM) and mechanical profilometry.
- Analysis of multilayer structure in relation to substrate properties.
Main Results:
- Substrate roughness significantly impacts the optical performance of Pt/C multilayers.
- Roughness is replicated into the multilayer structure, affecting scattering.
- The degree of replication depends on the substrate material and deposition process.
Conclusions:
- Careful substrate preparation is critical for achieving desired optical properties in Pt/C multilayers.
- Controlling substrate topography is key to optimizing multilayer performance for specific applications.
- This study provides insights into the structure-property relationships of Pt/C optical coatings.
