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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
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Off-axis electron holography without Fresnel fringes

Kazuo Yamamoto1, Tsukasa Hirayama, Takayoshi Tanji

  • 1Japan Society for the Promotion of Science, c/o Japan Fine Ceramics Center, 2-4-1, Mutsuno, Atsuta, Nagoya 456-8587, Japan. k_yamamoto@jfcc.or.jp

Ultramicroscopy
|September 29, 2004
PubMed

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