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Updated: Jul 29, 2026

Scanning-probe Single-electron Capacitance Spectroscopy
Published on: July 30, 2013
A spectroscopic scanning electron microscope design
Anjam Khursheed1, Mans Osterberg
1Electrical and Computer Engineering Department, National University of Singapore, Singapore. eleka@nus.edu.sg
Abstract:
This paper describes a proposal to improve the design of scanning electron microscopes (SEMs). The design is based upon using an SEM column similar to the conventional one, magnetic sector plates and a mixed field immersion objective lens. The optical axis of the SEM column lies in the horizontal direction and the primary beam is turned through 90 degrees before it reaches the specimen. This arrangement allows for the efficient collection, detection and spectral analysis of the scattered electrons on a hemispherical surface that is located well away from the rest of the SEM column. The proposed SEM design can also be easily extended to incorporate time multiplexed columns and multi-column arrays.
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