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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
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Characterization of DLC films by EELS and electron holography

Daisuke Shindo1, Takayuki Musashi, Yoichi Ikematsu

  • 1Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, Katahira 2-1-1, Sendai 980-8577, Japan. shindo@tagen.tohoku.ac.jp

Journal of Electron Microscopy
|February 8, 2005
PubMed

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