Selective protein adsorption on micro-textured P-type and N-type silicon wafers

There has recently been a great deal of effort put towards the development of bioMEMS-based electrochemical biosensors for use in implantable devices. Currently, the primary issue limiting the lifespan of implantable sensors is protein and cell adhesion (biofouling) to the sensor surface, which impedes the sensor's access to analyte. To better understand this problem, it would be useful to have an understanding of how silicon-based microdevices interact with proteins in a physiological environment. To help answer this question, we investigated the interactions of proteins with microtextured silicon wafers. Bulk micromachining techniques were used to create micro-textures that varied between 5 and 80 microns in size nd spacing. We used n-type and p-type silicon wafers with a <100> crystal orientation. Shapes such as rectangles, circles, and triangles were fabricated that were recessed into the silicon substrate. The features were estimated to be between 3 and 8 microns in depth. After the features were created, the wafers were coated with a layer of silicon dioxide. Once fabrication was complete, the wafers were incubated in vitro ith fluorescently tagged Albumin (500 microg/ml in Phosphate-Buffered Saline, PBS) for 5 minutes. The wafers were then rinsed with PBS solution and viewed using an epifluorescence microscope. Albumin adsorbed selectively onto the micropatterned wafers. Depending on the type of wafer we found that albumin adsorbed selectively onto either the bulk surface, the sidewalls, or the bottom of the etched feature.