Shay Wolfling1, Emmanuel Lanzmann, Moshe Israeli
1Nano-Or Technologies, Yodfat 1, Lod 71291, Israel. shayw@nano-or.com
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A novel spatial phase-shift interferometry method analyzes wavefronts using controlled spatial manipulations, replacing traditional reference beams. This technique demonstrates dependence on the spatial Airy number for accurate wavefront reconstruction.
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