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Updated: Aug 11, 2026

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Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization
Published on: July 17, 2015
Surface and interface studies of GaN epitaxy on Si(111) via buffer layers
Yukiko Yamada-Takamura1, Z T Wang, Y Fujikawa
1Institute for Materials Research, Tohoku University, Sendai, Japan.
Physical Review Letters
|February 21, 2006
Abstract:
Gallium nitride films, epitaxially grown on Si(111) via a lattice-matched ZrB(2) buffer layer by plasma-assisted molecular beam epitaxy, have been studied in situ by noncontact atomic force microscopy and also in real time by reflection high-energy electron diffraction. The grown films were determined to be always N-polar. First-principles theoretical calculations modeling the interface structure between GaN(0001) and ZrB(2)(0001) clarify the origin of the N polarity.

