P P Naulleau1, C H Cho, E M Gullikson
1Center for X-ray Optics, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA. pnaulleau@lbl.gov
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A new transmission phase grating was developed for extreme ultraviolet (EUV) interferometry. This grating offers improved performance for EUV phase-shifting point diffraction interferometers (PS/PDI) by meeting key efficiency and throughput requirements.
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