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    High-groove-density gratings were fabricated for Resonant Inelastic X-ray Scattering (RIXS) spectrometers. These advanced gratings enhance performance for the Qerlin beamline at the Advanced Light Source (ALS).

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    Area of Science:

    • Optics and X-ray Instrumentation
    • Materials Science and Nanofabrication

    Background:

    • Resonant Inelastic X-ray Scattering (RIXS) requires high-performance gratings for precise energy analysis.
    • The Advanced Light Source (ALS) Qerlin beamline necessitates advanced optical components for its new spectrometer.

    Purpose of the Study:

    • To design and fabricate high groove density blazed gratings for a RIXS spectrometer.
    • To optimize gratings for specific diffraction orders for enhanced spectral resolution.
    • To report on the fabrication processes and characterization of these novel gratings.

    Main Methods:

    • Utilized nanofabrication techniques: e-beam lithography, nanoimprint, plasma etch, and anisotropic wet etching.
    • Fabricated gratings with groove densities of 6000 lines/mm and 3000 lines/mm.
    • Characterized gratings at beamline 6.3.2 of the ALS.

    Main Results:

    • Successfully fabricated high groove density blazed gratings.
    • Achieved gratings optimized for 1st and 2nd negative diffraction orders.
    • Demonstrated the feasibility of advanced nanofabrication for synchrotron optics.

    Conclusions:

    • The developed nanofabrication process is effective for producing high-quality gratings for RIXS.
    • These gratings will significantly improve the capabilities of the Qerlin beamline spectrometer.
    • Further characterization confirms the suitability of these gratings for advanced X-ray applications.