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Defect-free nanoporous thin films from ABC triblock copolymers.

Joona Bang1, Seung Hyun Kim, Eric Drockenmuller

  • 1Department of Chemical and Biological Engineering, Korea University, Seoul 136-713, Republic of Korea.

Summary

Triblock copolymers self-assemble into ordered nanoporous arrays. Using a photodegradable mid-block (PMMA) creates highly regular, defect-free thin films for advanced lithography.

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