Frequency-comb-based interferometer for profilometry and tomography
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Updated: Aug 7, 2026

A Multimodal Wide-Field Fourier-Transform Raman Microscope
Published on: December 30, 2025
Samuel Choi1, Mitsufumi Yamamoto, Daisuke Moteki
1Department of Technology, Tokyo University of Agriculture and Technology, Koganei-shi, Tokyo, Japan. samuel@cc.tuat.ac.jp
Abstract:
A novel interferometry technique using a frequency-comb light source is proposed for surface profilometry and tomography of discontinuous objects. Surface profile measurement is performed by sweeping the comb interval frequency without mechanical scanning. Step heights of 0.5 and 1.0 mm are successfully measured by use of the scheme with 9 mum accuracy.
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