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Updated: Aug 7, 2026

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Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding
Published on: January 9, 2014
Subwavelength confinement in an integrated metal slot waveguide on silicon
Long Chen1, Jagat Shakya, Michal Lipson
1School of Electrical and Computer Engineering, Cornell University, Ithaca, NY 14853, USA. lc286@cornell.edu
Optics Letters
|June 24, 2006
Abstract:
We demonstrate propagation losses of less than 0.8 dB/microm in a metal slot waveguide on silicon with a predicted confinement substantially below the optical wavelength (approximately 1.55 microm). We also show compact and efficient coupling of the high-confinement metal slot waveguide with a standard silicon dielectric waveguide with a coupling efficiency of approximately 2.5 dB per facet.

