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Updated: Aug 7, 2026

A Microfluidic Chip for the Versatile Chemical Analysis of Single Cells
Published on: October 15, 2013
A low temperature bonding of quartz microfluidic chip for serum lipoproteins analysis
Guisheng Zhuang1, Qinghui Jin, Jing Liu
1Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Science, 865 Chang Ning Road, 200050 Shanghai, China. guishengzhuang@gmail.com
Abstract:
A low-temperature bonding method for microfabrication of quartz microfluidic chips has been developed. The bonding process involved two steps: pre-bonding and post-annealing at low temperature. The bonding quality was evaluated by measuring the shear force at bonding interface and the electrical properties of the chips. Shear force of 5.66 MPa (566 N/cm(2)) was obtained in a bonded chip after a post-annealing at 200 degrees C for 6 h. We owe the strong bonding strength to the formation of Si-O-Si bonds at the bonding interface during the post-annealing stage. The bonding procedures were not sensitive to surrounding and could be performed in a routine laboratory without clean room conditions. The performance of the fabricated microfluidic chips was tested by capillary zone electrophoresis (CZE) of serum lipoproteins with laser-induced fluorescence (LIF). The low-density (LDL) and high-density (HDL) lipoproteins in the serum was separated completely by using tricine buffer with methylglucamine.

