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Fabrication of Spatially Confined Complex Oxides
Published on: July 1, 2013
Spatially anisotropic etching of graphite by hyperthermal atomic oxygen
Kenneth T Nicholson1, Timothy K Minton, S J Sibener
1The James Franck Institute and Department of Chemistry, The University of Chicago, Illinois 60637, USA.
The Journal of Physical Chemistry. B
|July 21, 2006
Summary
Hyperthermal atomic oxygen beams reacting with graphite create unique, convex-bottomed circular pits. These surface morphologies result from anisotropic reaction kinetics and oxygen atom fluence.
Area of Science:
- Surface science
- Materials science
- Chemical kinetics
Background:
- Highly ordered pyrolytic graphite (HOPG) is a model system for studying surface reactions.
- Hyperthermal atomic oxygen is relevant to space environments and plasma processing.
Purpose of the Study:
- To investigate the surface morphologies resulting from the reaction of HOPG with hyperthermal atomic oxygen.
- To understand the kinetic factors governing the formation of unique surface structures.
Main Methods:
- Exposure of HOPG to a beam of atomic oxygen (O((3)P)) and molecular oxygen at hyperthermal energies (~8 km/s).
- Characterization of surface morphology using atomic force microscopy (AFM) and scanning tunneling microscopy (STM).
- Analysis of reaction kinetics at moderate temperatures (298-423 K).
Main Results:
- Formation of numerous multilayer circular pits with diameters from nanometers to micrometers.
- Observed convex curvature of pit bottoms, with the highest point at the center.
- Correlation of pit formation with spatially anisotropic kinetics and oxygen atom fluence.
Conclusions:
- The unique pit morphology arises from the interplay of pit nucleation kinetics, anisotropic HOPG reactivity (lateral and downward), and atomic oxygen fluence.
- The high reactivity of translationally hot oxygen atoms significantly influences the overall surface evolution.
- Spatially anisotropic kinetics are crucial in determining the resulting surface structures.

