Spatially anisotropic etching of graphite by hyperthermal atomic oxygen

Kenneth T Nicholson1, Timothy K Minton, S J Sibener

  • 1The James Franck Institute and Department of Chemistry, The University of Chicago, Illinois 60637, USA.

Summary

Hyperthermal atomic oxygen beams reacting with graphite create unique, convex-bottomed circular pits. These surface morphologies result from anisotropic reaction kinetics and oxygen atom fluence.