Variable bandwidth of dynamic add-drop filters based on coupling-controlled microdisk resonators
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Updated: Aug 6, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
1Institute of Photonics Technologies, National Tsing Hua University, Hsinchu 30055, Taiwan. mclee@ee.nthu.edu.tw
Abstract:
Dynamic add-drop filters with variable bandwidth are demonstrated on microelectromechanical-system (MEMS)-actuated microdisk resonators for what is believed to be the first time. The tuning mechanism is based on a variable power coupling ratio that is controlled by varying the gap spacing between the waveguide and the microdisk through MEMS actuators. The results show wavelength switching with an extinction ratio of 20 dB and a tunable bandwidth ranging from 12 to 27 GHz. These dual functions were realized using the device with the operation voltage varying between 0 and 35 V.
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