Chien Chou1, Hui-Kang Teng, Chien-Chung Tsai
1Institute of Radiological Science and Institute of Biophototnics, National Yang-Ming University, Taipei, Taiwan 112. cchou@ym.edu.tw
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A novel balanced detector interferometric ellipsometer (BDIE) offers sensitive thin-film analysis by measuring elliptical parameters. This technique simultaneously determines parameters, enhancing measurement precision and reducing noise.
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