Related Experiment Video
Updated: Jul 12, 2026
06:39
Aerosol-assisted Chemical Vapor Deposition of Metal Oxide Structures: Zinc Oxide Rods
Published on: September 14, 2017
Metal oxide thin films as sensing layers for ozone detection
M Suchea1, N Katsarakis, S Christoulakis
1Institute of Electronic Structure and Laser, Foundation for Research and Technology-Hellas, P.O. Box 1527, 71110 Heraklion, Crete, Greece. mirasuchea@iesl.forth.gr
Analytica Chimica Acta
|August 29, 2007
Summary
This study explores indium oxide thin films for ozone sensing. Researchers found that film stoichiometry and surface structure significantly impact gas sensitivity and electrical conductivity changes.
Area of Science:
- Materials Science
- Nanotechnology
- Chemical Sensing
Background:
- Indium oxide (In2O3) is a promising semiconductor material for gas sensors.
- Controlling the stoichiometry and surface morphology of In2O3 thin films is crucial for optimizing sensor performance.
- Understanding the relationship between structural properties and gas sensing behavior is essential for developing advanced sensing technologies.
Purpose of the Study:
- To investigate the structural, electrical, and ozone sensing properties of indium oxide (In2O3-x) thin films.
- To analyze the correlation between film stoichiometry, surface topology, and gas sensitivity.
- To evaluate the electrical conductivity changes in In2O3-x films under photoreduction and oxidation conditions.
Main Methods:
- Thin films of In2O3-x were fabricated using dc magnetron sputtering with varying thicknesses (100-990 nm).
- Structural characterization was performed using electron probe microanalysis (EPMA), secondary ion mass spectrometry (SIMS), and atomic force microscopy (AFM).
- Electrical conductivity measurements were conducted during photoreduction (UV light) and oxidation (ozone atmosphere) at room temperature.
Main Results:
- A strong correlation was observed between the stoichiometry, surface topology, and ozone sensing capabilities of the In2O3-x films.
- The electrical conductivity of the films demonstrated a significant change exceeding six orders of magnitude.
- These changes in conductivity occurred during photoreduction by ultraviolet light followed by oxidation in an ozone atmosphere at room temperature.
Conclusions:
- The stoichiometry and surface morphology are critical factors influencing the gas sensitivity of In2O3-x thin films.
- The observed large electrical conductivity changes highlight the potential of these films for highly sensitive ozone detection.
- The findings provide valuable insights for the design and fabrication of efficient indium oxide-based gas sensors.
