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07:37
Basic Research in Plasma Medicine - A Throughput Approach from Liquids to Cells
Published on: November 17, 2017
Small plasma source for materials application
A Vizir1, E M Oks, M C Salvadori
1High Current Electronics Institute, Russian Academy of Sciences, Tomsk 634055, Russia.
The Review of Scientific Instruments
|September 4, 2007
Abstract:
We describe a small hollow-cathode plasma source suitable for small-scale materials synthesis and modification application. The supporting electrical system is minimal. The gaseous plasma source delivers a plasma ion current of up to about 1 mA. Here we outline the source construction and operation, and present some of its basic performance characteristics.
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