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Phase-shifting polarization interferometry for microstructure linewidth measurement.

M Totzeck, H J Tiziani

    Optics Letters
    |December 12, 2007
    PubMed
    Summary
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    This study introduces a new method to measure the linewidth of steep microstructures using polarization anisotropy. The technique enhances edge detection in microscopy for precise material characterization.

    Area of Science:

    • Optics and Photonics
    • Materials Science
    • Microscopy

    Background:

    • Accurate measurement of microstructures is crucial for material characterization and device fabrication.
    • Existing linewidth measurement techniques face challenges with steep microstructures.
    • Polarization-dependent optical properties offer potential for enhanced imaging resolution.

    Purpose of the Study:

    • To develop a novel, non-contact optical procedure for measuring the linewidth of steep microstructures.
    • To leverage polarization anisotropy for selective edge detection in microscopy.
    • To demonstrate the efficacy of phase-shifting interferometry in conjunction with polarization for high-resolution imaging.

    Main Methods:

    • Integration of a liquid-crystal phase shifter and polarizer into a reflection-mode microscope.

    Related Experiment Videos

  • Application of phase-shifting interferometry to compare TM-polarized and TE-polarized images.
  • Utilizing polarization differences localized at structure edges for measurement.

    • Main Results:

    • Successful measurement of linewidths in steep microstructures.
    • Demonstration of selective edge detection based on polarization anisotropy.
    • High contrast imaging of microstructure edges achieved.

    Conclusions:

    • The novel polarization-based method provides an effective means to measure linewidths of steep microstructures.
    • This technique offers improved edge localization and contrast in microscopic imaging.
    • The procedure has potential applications in semiconductor manufacturing and micro-device analysis.