Atomic-resolution STEM in the aberration-corrected JEOL JEM2200FS

Area of Science:

• Materials Science
• Condensed Matter Physics
• Electron Microscopy

Background:

• High-resolution electron microscopy is crucial for understanding material properties at the atomic scale.
• Aberration correctors significantly enhance the resolution and information limit of Transmission Electron Microscopes (TEM) and Scanning Transmission Electron Microscopes (STEM).

Purpose of the Study:

• To evaluate the performance of aberration-corrected JEOL-JEM2200FS and JEOL-JEM2200MCO electron microscopes.
• To demonstrate the capabilities of these instruments for advanced materials research applications.

Main Methods:

• Utilized a Schottky field-emission gun operated at 200 kV with CEOS probe correctors and in-column energy filters.
• Performed Ronchigram and Young's fringe analysis to assess probe size and information limit.
• Conducted atomic-column-resolved Z-contrast imaging and electron energy-loss spectroscopy (EELS).

Main Results:

• Achieved routine resolution of the Si [110] dumbbell structure (approx. 1 Å probe size) in STEM mode.
• Extended the constant phase area from 15 mrad to 35 mrad after corrector tuning.
• Demonstrated an information limit of approximately 0.12 nm in TEM mode with aberration correction (Cs = -3.8 µm).

Conclusions:

• Aberration-corrected TEM/STEM instruments offer exceptional atomic-scale imaging capabilities.
• These microscopes are powerful tools for advanced materials research, including interface and strain analysis.
• Establishing a high-precision laboratory is essential for operating aberration-corrected electron microscopes.