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Updated: Jul 7, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
A 3.7 MHz phased array probe using 0.91Pb(Zn(1/3)Nb(2/3))O(3)-0.09PbTiO(3 )
S Saitoh1, T Takeuchi, T Kobayashi
1Research Laboratories, Research and Development Center, Toshiba Corporation, Kawasaki 210-8582, Japan. shiro.saito@toshiba.co.jp
A new single-crystal probe offers superior echocardiography imaging. This advanced probe provides higher echo amplitude and broader bandwidth for clearer visualization of blood flow, even in difficult cases.
Area of Science:
- Materials Science
- Biomedical Engineering
- Ultrasound Technology
Background:
- Conventional echocardiography probes often face limitations in sensitivity and image quality.
- Lead zirconate titanate (PZT) ceramics are standard materials, but advancements are sought for improved performance.
- Phased array probes are crucial for detailed cardiac imaging.
Purpose of the Study:
- To develop and evaluate a novel 128-channel phased array echocardiography probe.
- To investigate the performance benefits of using lead zinc niobate-lead titanate (PZN-PT) single-crystal material.
- To compare the PZN-PT probe's sensitivity, bandwidth, and imaging capabilities against conventional PZT probes.
Main Methods:
- Fabrication of a 128-channel phased array probe using 0.91Pb(Zn(1/3)Nb(2/3))O(3)-0.09PbTiO(3) (PZN-9%PT) single crystal.
- Characterization of echo amplitude, fractional bandwidth, and B-mode image quality.
- Assessment of Doppler sensitivity at 3 MHz and comparison with PZT probes.
- Evaluation of imaging performance in visualizing pulmonary vein blood flow in challenging patients.
Main Results:
- The PZN-9%PT probe demonstrated approximately 5 dB higher echo amplitude compared to PZT probes.
- A fractional bandwidth improvement of about 25 percentage points was observed with the PZN-9%PT probe.
- B-mode image quality from the PZN-9%PT probe met or exceeded that of conventional 2.5 and 3.75 MHz PZT probes.
- Doppler sensitivity was approximately 5 dB higher for the PZN-9%PT probe at 3 MHz.
- Significantly clearer imaging of pulmonary vein blood flow was achieved in difficult-to-image patients.
Conclusions:
- The novel PZN-9%PT single-crystal phased array probe offers enhanced sensitivity and broader bandwidth for echocardiography.
- This advanced probe material significantly improves B-mode and Doppler imaging capabilities over traditional PZT probes.
- The use of large PZN-9%PT single crystals, produced via the self-flux method, is key to achieving superior ultrasound imaging performance.
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