Modeling and analysis of equipment managers in manufacturing execution systems for semiconductor packaging

Area of Science:

• Manufacturing Systems Engineering
• Industrial Engineering
• Computer Science

Background:

• Equipment Managers (EMs) are crucial for Manufacturing Execution Systems (MES), acting as intermediaries between MES components and factory equipment.
• Evaluating EM validity and performance within the MES is essential for optimizing manufacturing operations.

Purpose of the Study:

• To propose a novel methodology for developing analytical and simulation models of EMs.
• To enable the evaluation of EM validity and performance within a Manufacturing Execution System (MES).

Main Methods:

• Collected domain knowledge and requirements from a semiconductor packaging factory.
• Developed static functional (IDEFO) and dynamic state (state diagrams) models of the EM.
• Translated these models into a Petri net model for qualitative and quantitative analysis.
• Expanded the EM Petri net model to an MES Petri net model for integrated performance evaluation.

Main Results:

• Successfully built functional and state models for the Equipment Manager.
• Established a Petri net model for the EM, allowing for system analysis.
• Integrated the EM model into a larger MES Petri net model to assess performance in a real-world context.

Conclusions:

• The proposed methodology provides a framework for evaluating EM performance within MES environments.
• The developed models serve as valuable references for design and decision-making in semiconductor manufacturing.
• This approach facilitates a comprehensive understanding of EM roles and their impact on overall system efficiency.