A Shack-Hartmann measuring head for the two-dimensional characterization of X-ray mirrors

The recent development of short-wavelength optics (X/EUV, synchrotrons) requires improved metrology techniques in terms of accuracy and curvature dynamic range. In this article a stitching Shack-Hartmann head dedicated to be mounted on translation stages for the characterization of X-ray mirrors is presented. The principle of the instrument is described and experimental results for an X-ray toroidal mirror are presented. Submicroradian performances can be achieved and systematic comparison with a classical long-trace profiler is presented. The accuracy and wide dynamic range of the Shack-Hartmann long-trace-profiler head allow two-dimensional characterizations of surface figure and curvature with a submillimeter spatial resolution.