Digital recording and numerical reconstruction of lensless fourier holograms in optical metrology
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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
C Wagner1, S Seebacher, W Osten
1Bremer Institut für Angewandte Strahltechnik, GmBH, Klagenfurter Strasse 2, D-28211 Bremen, Germany.
Abstract:
Advantages of the lensless Fourier holography setup for the reconstruction of digitally recorded holograms in holographic interferometry are presented. This very simple setup helps to achieve a maximum lateral resolution of the object under investigation. Also, the numerical-reconstruction algorithm is very simple and fast to compute. A mathematical model based on Fourier optics is used to describe discretization effects and to determine the lateral resolution. The recording and the reconstruction processes are regarded as an optical imaging system, and the point-spread function is calculated. Results are verified by an experimental setup for a combined shape and deformation measurement.

