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X-ray interferometry of surfaces with Fresnel mirrors
S Marchesini1, K Fezzaa, M Belakhovsky
1Département Recherche Fondamentale sur la Matière Condensée, Commissariat à l'Energie Atomique, Gernoble, France. smarchesini@cea.fr
Applied Optics
|March 18, 2008
Summary
Grazing X-ray interferometry precisely measured nanometric steps on microfabricated surfaces. This technique offers a straightforward method for step size determination using a double-mirror setup.
Area of Science:
- Materials Science
- Nanotechnology
- Optics and Photonics
Background:
- Studying nanoscale surface features is crucial for advanced materials and devices.
- Traditional surface metrology techniques can be limited in resolution and non-contact capabilities.
Purpose of the Study:
- To investigate the application of grazing X-ray interferometry for characterizing nanometric surface steps.
- To explore two distinct geometrical configurations for X-ray interferometry measurements.
Main Methods:
- Utilized a grazing X-ray interferometry setup with a double-mirror configuration.
- Microfabricated one-dimensional steps on the surface of one mirror, using the second as a reference.
- Examined both longitudinal and transverse X-ray geometries relative to the step edges.
Main Results:
- Demonstrated straightforward determination of step size in the longitudinal geometry where X-rays are parallel to step edges.
- Successfully applied Fourier holography and phase reconstruction in the transverse geometry for a single step.
Conclusions:
- Grazing X-ray interferometry is an effective technique for nanometric step characterization.
- The study highlights the versatility of the method across different geometrical configurations for surface metrology.
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