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Implementation of a Reference Interferometer for Nanodetection
Published on: April 26, 2014
Real-time displacement measurement with a two-wavelength sinusoidal phase-modulating laser diode interferometer.
T Suzuki1, K Kobayashi, O Sasaki
1Faculty of Engineering, Niigata University, 8050 Ikarashi 2, Niigata 950-2181, Japan.
Applied Optics
|March 18, 2008
Summary
This study introduces a novel two-wavelength interferometer for real-time object displacement detection. The new modulating technique achieves high precision, reducing measurement errors and enabling effective disturbance elimination.
Area of Science:
- Optics and Photonics
- Metrology and Measurement Science
Background:
- Interferometry is crucial for precise measurements.
- Real-time displacement detection faces challenges with accuracy and external disturbances.
Purpose of the Study:
- To propose and demonstrate a two-wavelength interferometer for enhanced real-time object displacement measurement.
- To improve measurement accuracy and enable disturbance elimination.
Main Methods:
- Utilized a two-wavelength interferometer.
- Employed two separate modulating currents with different phases but the same frequencies.
- Integrated a simple feedback-control system.
Main Results:
- Achieved a measurement error of 57 nm, approximately 1/80 of the synthetic wavelength.
- Demonstrated real-time detection of object displacement.
- Successfully eliminated external disturbances using the feedback-control system.
Conclusions:
- The proposed two-wavelength interferometer with phase-modulated currents effectively enhances displacement measurement.
- The technique allows for high-precision, real-time measurements with integrated disturbance rejection.
