Theoretical limits of scanning white-light interferometry signal evaluation algorithms.

Area of Science:

• Optics and Metrology
• Materials Science
• Biophysics

Background:

• Scanning white-light interferometry (SWLI) is a key technique for high-resolution surface topography measurement.
• Accurate microstructure analysis is crucial in fields ranging from semiconductor manufacturing to biomedical research.
• Current SWLI evaluation algorithms can be limited by noise and optical aberrations.

Purpose of the Study:

• To investigate the theoretical limits of resolution in SWLI.
• To analyze the properties of mathematically optimal algorithms for interferogram evaluation.
• To compare the performance of optimal methods against existing literature algorithms.

Main Methods:

• Mathematical analysis of optimal interferogram evaluation algorithms.
• Derivation of resolution limits based on SWLI system parameters.
• Comparative performance analysis using simulated and experimental data.

Main Results:

• Identified optimal evaluation strategies for maximizing resolution in SWLI.
• Quantified the achievable resolution as a function of system parameters.
• Demonstrated superior performance of optimal methods compared to a literature algorithm.

Conclusions:

• Optimized algorithms significantly enhance the resolution achievable with SWLI.
• Understanding parameter dependencies is critical for maximizing microstructure analysis accuracy.
• This work provides a framework for developing next-generation SWLI evaluation techniques.