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Updated: Jul 4, 2026

Light Enhanced Hydrofluoric Acid Passivation: A Sensitive Technique for Detecting Bulk Silicon Defects
Published on: January 4, 2016
M Filoche1, D S Grebenkov, J S Andrade
1Physique de la Matière Condensée, Ecole Polytechnique, Centre National de la Recherche Scientifique, 91128 Palaiseau, France. marcel.filoche@polytechnique.edu
This study reveals how surface activity shifts during passivation. In 3D, active zones shrink over time, impacting surface efficiency and geometry-dependent behaviors, unlike in 2D.
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