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Quantitative atomic resolution scanning transmission electron microscopy.

James M LeBeau1, Scott D Findlay, Leslie J Allen

  • 1Materials Department, University of California, Santa Barbara, California 93106-5050, USA. lebeau@mrl.ucsb.edu

Physical Review Letters
|June 4, 2008
PubMed
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Quantitative agreement in atomic resolution high-angle annular dark-field (Z-contrast) imaging is achieved by normalizing intensities to the incident beam. Simulations incorporating spatial incoherence closely match experimental images of strontium titanate crystals.

Area of Science:

  • Materials Science
  • Solid-State Physics
  • Electron Microscopy

Background:

  • High-angle annular dark-field (HAADF) or Z-contrast imaging provides atomic resolution information.
  • Quantitative interpretation of HAADF images necessitates agreement between experimental data and simulations.
  • Intensity variations in HAADF images traditionally pose challenges for absolute quantification.

Purpose of the Study:

  • To establish a method for quantitative analysis of HAADF imaging.
  • To achieve precise agreement between experimental HAADF images and simulations.
  • To validate the role of spatial incoherence in HAADF imaging simulations.

Main Methods:

  • Normalization of experimental image intensities to the incident electron beam intensity.

Related Experiment Videos

  • Construction of fractional intensity images for strontium titanate (SrTiO3) single crystals across varying thicknesses (up to 120 nm).
  • Direct comparison of experimental images with detailed image simulations.

    • Main Results:

    • Intensity variations in HAADF images can be accurately scaled to an absolute measure.
    • Experimental fractional intensity images show excellent correlation with simulated images.
    • Inclusion of spatial incoherence in simulations is critical for achieving near-perfect agreement.

    Conclusions:

    • A robust method for quantitative HAADF imaging has been demonstrated.
    • Simulations that account for spatial incoherence accurately reproduce experimental results.
    • This work facilitates more precise interpretation and analysis of atomic-resolution HAADF images.